Vertical FET with nanowire channels and a silicided bottom contact

ABSTRACT

A vertical FET structure with nanowire forming the FET channels is disclosed. The nanowires are formed over a conductive silicide layer. The nanowires are gated by a surrounding gate. Top and bottom insulator plugs function as gate spacers and reduce the gate-source and gate-drain capacitance.

FIELD OF THE INVENTION

The present invention relates to electronic devices based onsemiconductor nanowires, and more specifically to a vertical fieldeffect transistor (FET) with nanowire channels and a silicided bottomcontact. The present invention also relates to methods of fabricatingthe vertical FET containing nanowire channels and a silicided bottomcontact.

BACKGROUND OF THE INVENTION

Conventional vertical FETs are devices in which the source-drain currentis flowing in a direction perpendicular to the substrate surface. Forexample, if the substrate surface is made horizontal, then the verticalFET is typically a vertical pillar with the drain and source being thetop and bottom portion of the pillar. One of the main advantages of thevertical FET is that the channel length is not defined by lithography,but rather by methods such as epitaxy or layer deposition which providegood thickness control even at nanometer dimensions. Some examples ofvertical FET are found in Min Yang, et al., “25-nm p-channel verticalMOSFET's with SiGeC source-drains”, IEEE Electron Dev. Lett., 20, p.301, (1999), and J. M. Hergenrother, et al., “The verticalreplacement-gate (VGR) MOSFET: A 50 nm vertical MOSFET withlithography-independent gate length”, Int. Electron Dev. Meeting (IEDM),p. 75, 1999.

Conventional vertical FETs have several issues. First, it is difficultto efficiently contact the source (or drain) at the bottom of thepillar. This difficulty results in a relatively high access seriesresistance to the source (or drain). Second, doping cannot be achievedby implantation, but rather by in-situ doping during epitaxy, ordiffusion from solid sources. Third, the gate-source capacitance is highsince the gate conductor overlaps the source conductor. Fourth, thechannel surface is defined by etching of the pillar or by epitaxialgrowth from a trench; etching typically leaves rough walls withreactive-ion etch (RIE) damage, while constrained epitaxy also exhibitsdefects. Fifth, fabrication of n-FETs and p-FETs devices on the samewafer for CMOS circuits requires the introduction of different dopantsin the gate and the source and drain regions. This is very difficult todo because of the incompatibility with ion-implantation that isroutinely used with planar FETs. Given the above challenges, prior artvertical FETs were rarely used for CMOS technology.

Recent work has shown that silicon nanowires can be used to fabricateFETs. See, for example, Yi Cui, et al., “High Performance SiliconNanowire Field Effect Transistors”, Nano Lett., 3(2), p.149, (2003),Andrew B. Greytak, et al., “Growth and transport properties ofcomplementary germanium nanowire field-effect transistors”, Appl. Phys.Lett., 84(21), p. 4176, (2004), and Xiangfeng Duan, et. al,“High-performance thin-film transistors using semiconductor nanowiresand nanoribbons”, Nature, 245, p. 274, (2003). As of now, reportednanowire FETs mainly used a horizontal configuration where a singlenanowire was contacted by conventional lithography and back gated byapplying voltage to the substrate (see, Yi Cui, et al. and Andrew B.Greytak, et al. mentioned above). In these reports, the position of thenanowires contacted to make a FET was random and their current drive waslimited to a single nanowire.

Recently a horizontal (planar) thin film transistor (TFT) using aplurality of parallel nanowires that were assembled using a fluidic flowalignment approach (uniaxially compressed on a Langmuir-Blodgett) wasreported. See, for example, Xiangfeng Duan, et al., “High-performancethin-film transistors using semiconductor nanowires and nanoribbons”,Nature, 245, p. 274, (2003). Yet, the issue of how to accuratelyposition and orient nanowires for making planar nanowire FETs on a largescale is currently an open problem.

To circumvent the manipulation of nanowires, it possible to build avertical nanowire FET, where the position of the nanowires is alreadydetermined at the time of the nanowire growth. In this case, the FET'schannel consists of a plurality of nanowires to meet a specified currentdrive. A first report on vertical surround-gate FET using a single ZnOnanowire channel is given in Hou T. Ng, et al., “Single Crystal NanowireVertical Surround-Gate Field-Effect Transistor”, Nano Lett., 4(7), p.1247, (2004).

The Hou T. Ng, et al. paper does not address the main deficienciesassociated with vertical MOSFETs, which are how to reduce the accessresistance to the bottom contact, and how to accurately control the gatelength. Additionally, the Hou T. Ng, et al. paper does not address howto use a plurality of nanowires in the fabrication of the MOSFET.

In view of the foregoing, there is a need for providing a vertical FETwhich includes a plurality of nanowire channels in which the accessresistance to the bottom contact is reduced and where the gate length iscontrolled.

SUMMARY OF THE INVENTION

The present invention provides a vertical FET with nanowire channels.Each vertical FET of the present invention includes a plurality ofnanowire channels. The nanowires used as the channels of the inventivevertical FET are formed over a crystalline conductive layer, such as asilicide layer, to reduce the access series resistance to the source.The nanowires are surrounded by a gate material and are made with asmall diameter (on the order about 10 nm or less) to obtain good shortchannel characteristics (e.g., the present invention substantiallyreduces the short channel effect which is the decrease of the MOSFETthreshold voltage as the channel length is reduced). The nanowires ofthe inventive vertical FET are formed in a dense array so thegate-source overlap capacitance is reduced.

In a first aspect of the present invention, a semiconductor structuresuch as a FET comprising nanowire channels, a surrounding gate forcontrolling the current through the nanowire channels, top and bottomsource and drain regions located in each nanowire, and a conductivebottom contact layer is described.

Specifically, the semiconductor structure of the present inventionincludes a silicide contact layer located within, or on, a portion of asemiconductor substrate; a plurality of nanowires located on saidsilicide contact layer; a gate dielectric surrounding said plurality ofnanowires; a gate conductor located on said gate dielectric; and asource and drain located at each end of said nanowires.

More specifically, the FET of the present invention comprises a bottomepitaxial conductive layer; a plurality of semiconductor nanowirechannels located on said bottom epitaxial conductive layer, wherein saidplurality of semiconductor nanowire channels are perpendicular to saidbottom epitaxial conductive layer; a top contact layer located over saidnanowire channels, wherein the contact layer is perpendicular to saidplurality of semiconductor nanowire channels; a gate dielectricsurrounding each of said semiconductor nanowire channels; a gateconductor surrounding said gate dielectric, wherein said gate conductoris spaced from the bottom epitaxial conductive layer by a bottominsulating layer and said gate conductor is spaced from the top contactlayer by an insulator plug; and a source and drain located at each endof said plurality of semiconductor nanowire channels.

In some embodiments of the present invention, the spacing betweennanowires channels is comparable to the nanowire channel diameter.Typically, the spacing between each nanowire is from about 2 nm to about50 nm, which is substantially equal to the diameter of an individualnanowire channel.

In a second aspect of the present invention, methods for fabricating asemiconductor structure such as a FET with nanowire channels aredescribed. In one of these methods, the surface of a semiconductorsubstrate is exposed in selected regions designated for FETs and asilicide contact layer is formed in the exposed regions. The silicidecontact can be formed within the semiconductor substrate at a surfaceportion thereof, or atop the semiconductor substrate. The silicidecontact layer formed preserves the crystalline template of theunderlying silicon; hence the silicide contact layer mimics thesemiconductor substrate crystal orientation. A catalyst is placed overthe silicide layer and nanowires are grown perpendicular to thesubstrate surface. The nanowires formed may include a material that isthe same or different from the semiconductor substrate. The catalyst istypically removed from the tip of each of the nanowires, and a conformalgate dielectric is deposited. A gate conductor material is depositedthat fills the space between the nanowires. The structure is thenplanarized by chemical mechanical polishing (CMP). The planarizationtrims the nanowires to a specified length and removes the excess gatematerial. The gate material is recessed with respect to the top surfaceof the nanowires. Insulator plugs are formed in the recessed region anda top contact is formed. Gate and source contacts vias are made tocomplete the device fabrication.

The method of the present invention is described using silicon nanowiresand silicon processing. The method can also be practiced with othersemiconductors such as Ge or III-V semiconductors. One of the advantagesof using nanowires is that due to their typical small diameter (a fewnanometers) the nanowires can be grown on a crystalline substrate evenif a large lattice mismatch is present. For example, Ge nanowires can begrown on a silicon substrate. Therefore, the vertical FET channel can bemade of semiconductor nanowires other than silicon even if the substrateis silicon.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1-10 and 17 are pictorial representations (through cross sectionalviews) illustrating the basic processing steps for fabricating avertical FET with nanowire channels.

FIGS. 11-16 are pictorial representations (top views) illustrating thebasic mask set used for fabricating a vertical FET with nanowirechannels.

FIGS. 18-31 are pictorial representations (through cross sectionalviews) of a second embodiment illustrating the basic processing stepsused in the present invention for fabricating a vertical FET withnanowire channels.

FIGS. 32-37 are pictorial representations (through cross sectionalviews) of a third embodiment illustrating the basic processing stepsused in the present invention for fabricating a vertical FET withnanowire channels.

FIGS. 38 and 39 are pictorial representations (through cross sectionalviews) illustrating another embodiment of the present invention in whichnanowires are grown on a heavily-doped epitaxial semiconductor layer.

DETAILED DESCRIPTION OF THE INVENTION

The present invention, which provides a vertical FET with nanowirechannels as well as methods for fabricating the same, will now bedescribed in greater detail by referring to the following discussion. Inthis discussion, reference will be made to various drawings thatillustrate embodiments of the present invention. Since the drawings ofthe embodiments of the present invention are provided for illustrativepurposes, the structures contained therein are not drawn to scale.

It is again emphasized that the method of the present invention isdescribed using silicon nanowires and silicon processing. The inventivemethod can also be practiced with other semiconductors such as Ge orIII-V semiconductors. When non-Si-containing semiconductors are used,the processing steps of the present invention are basically the sameexcept that a layer of Si can be formed atop the non-semiconductorsurface prior to forming the silicide contact layer. Use ofSi-containing semiconductor materials such as Si, SiGe, Si/SiGe,silicon-on-insulator (SOI), silicon germanium-on-insulator (SGOI), SiCor SiGeC, for example, are however preferred.

The basic method is shown in FIGS. 1-10 and 17. A silicon wafer 10 isused as the starting semiconductor substrate. The Si substrate istypically chosen to have the (111) orientation so that the nanowiresgrowth will be perpendicular to the substrate surface. Although a (111)crystal orientation is typically used, the present invention alsocontemplates using substrates that have other crystallographicorientations. An insulator film 12 such as silicon dioxide (SiO₂),silicon nitride (Si₃N₄) or silicon oxynitride (SiON) is deposited on thesubstrate 10. Openings 14, one of which is shown in FIG. 1, are formedin the insulator film 12 by conventional lithography and etching.Openings 14 are defined by mask 1 as shown in FIG. 11. The location ofthe openings 14 defines the region that will be occupied by the verticalFET. The exposed substrate 10 is heavily doped (on the order of about10²⁰ cm⁻³) to form n⁺⁺ region 16 in the substrate 10. A blanketion-implant, or gas phase doping can be used to introduce the dopantinto the exposed region. Examples of n-type dopants are phosphorus (P),and arsenic (As). When a p-FET is fabricated, the n-type region 16 isreplaced with a p-type region. Examples of p-type dopants are boron (B),and indium (In).

A layer of metal 18, such as nickel (Ni), cobalt (Co), titanium (Ti),tungsten (W) or other like metals that are capable of forming a silicidewhen reacted with silicon, is blanket deposited as illustrated in FIG.2. Preferably, Ni or Co are employed since those materials can formepitaxial conductive layers. The metal deposition is typically carriedout by sputtering, evaporation, chemical vapor deposition or a similardeposition process. The layer of metal 18 is reacted with the exposedsilicon surface 10 to form a silicide contact 20. The silicide formationincludes the uses of a conventional self-aligned silicidation (SALICIDE)process. With this process, the silicide forms only over exposed siliconregions. The exact conditions of the anneal used during the self-alignedsilicidation process may vary depending on the type of metal used aslayer 18. A single anneal step may be used, followed by etching of anyunreacted metal. Alternatively, the silicide contact 20 can be formed bya first anneal, etching and a second anneal, wherein the temperature ofthe first anneal is typically lower than the temperature of the secondannealing. In cases where a non Si-containing semiconductor substrate isformed, a Si layer is typically formed within the opening prior to metallayer 18 deposition. Alternatively, a metal-semiconductor alloy can beformed, if it has low resistance (on the order of about 50 μω-cm orless). For example, if a germanium (Ge) substrate is used ametal-gemanide alloy such as Ni-germanide can be formed.

Depending again on the type of metal used as well as the annealconditions different phases of the silicide contact can be formed. Inthe case of Ni, for example, the metal-silicide that forms is eitherNiSi or NiSi₂. The NiSi phase forms by annealing the substrate 10including metal layer 18 at a temperature of about 450° C. The NiSi₂phase forms by annealing the substrate at a temperature above 750° C.Since the metal layer 18 reacts only with the exposed silicon aselective etch is used to remove the unreacted metal 18 from non-siliconsurfaces (FIG. 3). An example of the etch chemistry used to remove theunreacted metal is H₂O₂:H₂SO₄ 10:1 at 65° C. for 10 min. The NiSi phasehas a lower resistivity than NiSi₂. However, the NiSi₂ phase can beepitaxial to silicon so it does preserve the crystal template of theunderlying silicon substrate. See, for example, R. T. Tung, et al.,“Formation of Ultrathin Single-Crystal Silicide Films on Si: Surface andInterfacial Stabilization of Si—NiSi₂ Epitaxial Structures”, Phys. Rev.Lett. 50, p. 429 (1983), and R. T. Tung, et al., “Growth of singlecrystal epitaxial silicides on silicon by the use of template layers”,Appl. Phys. Lett. 42, p.888 (1983). This property of NiSi₂ enables thegrowth of silicon nanowires over a silicide contact 20 that maintain thesame crystal orientation as that of the substrate 10.

Referring to FIG. 4, the insulator film 12 is stripped and a bi-layerfilm 22 consisting of layers 22A and 22B is deposited. These layers canbe SiO₂ and Si₃N₄, respectively. The bi-layer film 22 is patterned intwo steps: Following the example illustrated by FIGS. 12 and 13, mask 2is first used to etch a “T” shape in the top film 22B. The etch stops onthe insulator film 22A. Then mask 3 is used to define the region wherelayer 22A is etched. The exposed silicide contact 20 surface iscontained within the region defined by the opening 14 (mask 1).

Catalyst dots 24 such as Au, Ga, Al, Ti, and Ni for the nanowire growthare formed over the exposed silicide contact 20. Of the catalyst dots 24mentioned herein, Au dots are preferred. The catalyst dots 24 can beformed by patterning a catalyst film into dots or by dispensing acolloid containing said catalyst. It is noted that the size, e.g.,width, of the catalyst dots 24 defines the nanowire diameter. Thus,accurate control of the dot size is important for obtaining a tightdistribution of the nanowire's diameter. Other methods for introducingthe catalyst are also possible. For example, a thin catalyst film willagglomerate into separated catalyst droplets if annealed at elevatedtemperatures (e.g., above 350° C.). The catalyst agglomeration method,however, does not yield a narrow distribution of the dot size astypically obtained by the catalyst suspension method. Moreover, thecatalyst dots can be formed utilizing a self-assembly process. The term“self-assembly” is used herein to denote the spontaneous organization ofa material into a regular pattern. The self-assembly process utilizesblock copolymers and techniques well known in the art.

Referring to FIG. 4 and 5, nanowires 26 are grown perpendicular to thesubstrate 10 surface. The growth of the nanowires 26 is assisted by thecatalyst dots 24 and is typically carried out by chemical vapordeposition (CVD) or plasma enhanced chemical vapor deposition (PECVD).The growth temperature depends on the precursor used. For example, forsilane (SiH₄) a typical growth temperature is from about 370° C. toabout 500° C. For silicon tetrachloride (SiCl₄), the growth temperatureis from about 800° C. to about 950° C. By adding chlorine to SiH₄, thegrowth temperature can be raised to above 600° C. The growth rate of thenanowires 26 depends on the growth temperature and the gas pressure inthe growth chamber. For example, a typical CVD growth rate for SiH₄diluted with H₂ (1:1) at a pressure of 1 torr and a growth temperatureof 450° C. is about 7.6 μm/hour. The anisotropic growth of the nanowires26 is believed to be best described by the vapor-liquid-solid (VLS)mechanism, which is described, for example, in E. I. Givargizov, HighlyAnisotropic Crystals, Kluwer academic publishers, Norwell M A, 1986.When the growth is initiated, a catalyst-silicon liquid alloy 28 isformed. With additional supply of Si from the gas phase (e.g., SiH₄),the liquid droplet becomes supersaturated with Si and the excess siliconis deposited at the solid-liquid interface. As a result the liquiddroplet 28 rises from the original substrate surface to the tip of agrowing nanowire crystal. If the growth temperature is kept below about500° C. (if SiH₄ is used), or alternatively a chlorine additive is used,no deposition of silicon take place on the other surfaces. Note that thenanowires 26 can be comprised of the same or different material as thatof the semiconductor substrate. In one embodiment, it is preferred thatthe nanowires 26 by comprised of a material that is different from thesemiconductor substrate. In yet another embodiment of the presentinvention, the nanowires are single-crystal Si nanowires havingsubstantially the same crystal orientation.

In the specific example described herein in which Si nanowires areformed on a (111) oriented Si substrate, the silicon nanowiresorientation is (111) as it is seeded from the substrate 10 which alsohas the (111) orientation. This is why a silicide film 20, which mimicsthe substrate's orientation is used. The nanowires 26 are grown to alength that typically exceeds the total thickness of the films 22A and22B. It is noted that the nanowires 26 are grown perpendicular to thesurface of substrate 10.

Referring to FIG. 6, a conformal gate dielectric 30 is blanket depositedover the substrate. Some examples of gate dielectrics include, but arenot limited to: SiO₂, Al₂O₃, and HfO₂. The deposition of the gatedielectric 30 is performed by techniques such as, for example, CVD oratomic layer deposition (ALD). It is noted that since there is no moreneed for the catalyst 24 once the nanowires 26 growth is completed, itcan be removed by selective etching prior to the gate dielectric 30deposition. On the other hand, keeping the catalyst 24 can provideadditional etch selectivity and thus protect the nanowires 26 during thegate conductor recess etch as will be discussed later.

Referring to FIG. 7, a conformal gate conductor 32 is deposited over thegate dielectric 30. The gate conductor 32 fills the space between thenanowires 26 . The gate conductor 32 can be doped poly-silicon, or aconductive metal such as tungsten (W), aluminum (Al), copper (Cu), ortantalum (Ta). Alloys of the conductive metals as well as silicides ornitrides of said conductive metals are also contemplated herein. Thegate conductor 32 is then recessed by selective etching with respect tothe gate dielectric 30 to provide the structure shown, for example, inFIG. 8. As shown, this step of the present invention brings the topportion of the recessed gate conductor 32 below the surface line of theinsulator layer 22. Another insulator 34 such as a low temperature oxide(LTO) is blanket deposited over the structure. The structure is thenplanarized by CMP to provide the structure illustrated by FIG. 9. Theinsulator layer 22B is used as a CMP stop layer. The CMP step trims thenanowires 26 to be all of the same length. It also forms insulator plugs34 that buffer the recessed gate conductor 32 from the top surface. Thisallows contacting the exposed ends of the nanowires 26 without shortingto the gate 32. Using a SALICIDE process, the tip of each nanowire 26 issilicided forming ends 38 that are silicided.

FIGS. 10 (through A-A′ shown in FIG. 16, which is a top down view) and17 (through B-B′ shown in FIG. 16) show the device in the two maincross-sections after contacts were made to the source, drain and gate.To contact the source, a via hole 40 is made to the silicide surface 20.Similarly a via hole 42 is made to the gate conductor 32. The via holesfor the gate and source are defined by masks 5 and 4 of FIG. 14,respectively. Finally, the drain contact 44, source contact 46 and thegate contact 48 are defined by mask 6 (FIG. 15).

FIGS. 18 to 31 show another method for the fabrication of a vertical FETwith nanowire channels. The method is similar to the one discussed inFIGS. 1-17 with the following changes: (i) The catalyst is removedimmediately following the growth step. (ii) There are three CMP steps:The first trims the nanowires so they all have of the same length. Thesecond CMP step is used to remove the excess gate conductor material andthe third CMP step is used to form LTO plugs over the gate conductor.(iii) The exposed top portion of the nanowire is silicided before thegate material is deposited.

The changes are introduced to allow a more robust process in view ofprocess variations. For example, planarization of the gate conductorprior to the recess step (FIGS. 7-8) will generally results in a bettercontrol of the recess depth. The silicide formation at the top portionof the nanowire provides better selectivity during the CMP process andthe etching used for recessing the gate conductor.

The processing steps shown in FIGS. 18-22 are identical to thosediscussed earlier with respect to FIGS. 1-5. Referring to FIGS. 22-23,the catalyst-silicon liquid alloy 28 is selectively removed by etchingand a conformal gate dielectric 30 is deposited over the structure. Afilling material 50 (organic or inorganic) such as photoresist, apolyimide or a low temperature oxide (LTO) is deposited over thestructure (see, FIG. 24). The filling material 50 is chosen such that itcan be selectively removed with respect to the gate dielectric 30. Thewafer is planarized by CMP, with layer 22B being a hard stop for CMP. Asa result all the nanowires 26 are trimmed to a single length equal tothe bi-layer 22 total thickness (FIG. 25).

The filling material is etched out selectively and a SALICIDE step isapplied to the wafer. As a result the exposed silicon surface at the tipof each nanowire is converted into silicide 38 (FIG. 26). The silicide38 can be, for example, NiSi, TiSi₂ or CoSi₂.

Referring to FIG. 27, a gate conductor 32 is blanket deposited and CMPis applied to remove any excess gate material above the surface of film22. The gate material 32 is selectively recessed with respect to thesilicide 38 at the top surface of the nanowires 26 (FIG. 28). Aninsulator 34 such as LTO is blanket deposited and CMP is applied toremove the LTO above the surface of film 22. As a result LTO plugs 34are formed over the recessed gate conductor 32 (FIG. 29). The LTO plugs34 isolate the contact made to the top of the nanowires from shorting tothe gate.

FIGS. 30 and 31 show the final structure in the two main cross sectionsA-A′ and B-B′. To complete the fabrication, gate via 42 and source via40 are formed and filled with a gate contact metal and the sourcecontact metal. Finally, the drain contact 44, source contact 46 and gatecontact 48 are formed. As shown, the drain contact metal 44 makescontact to the silicide 38 at the top end of the nanowires 26.

FIGS. 32 to 37 show another method for the fabrication of a vertical FETwith nanowire channels that reduces the gate-source overlap capacitance.The resulting structure is similar to the one discussed in the twoprevious embodiments with the exception that there is an insulator plug70 (similar to the top LTO plug 34) at the bottom end of the nanowires26. Note that insulator plug 70 is comprised of a dielectric such asSiO₂. By further offsetting the bottom conductive silicide 20 layer thatconnects to the source from the gate conductor 32 the insulator plugshelps reducing the overlap capacitance between the gate and the source.

The processing steps illustrated by FIGS. 32-34 are identical to thosediscussed for FIGS. 1-3. Referring to FIG. 35 the catalyst 24 issurrounded by an insulating film 70 that is comprised of insulator 22A.The catalyst 24 is also in contact with the silicide layer 20. Thecatalyst 24 being in contact with layer 20 is required so that thenanowire orientation mimics that of the substrate 10. There are severalapproaches to fabricate catalysts 24 surrounded by an insulator layer22A. In a first approach, openings having the size of the desiredcatalyst are made in the film 22A. This can be done by forming aself-assemble mask such as a di-block polymer over the insulator film22A. One example of a di-block copolymer is a copolymer of polystyreneand poly(methyl methacrylate). The pores in the di-block polymer maskdefine the opening in the film 22A, which are etched by RIE. Gold oranother like nanowire catalyst material is later introduced into theopenings by plating. The catalyst 24 would not plate over the insulatorfilm surface 22A, so catalyst 24 is only added into the openings in thefilm 22A.

In a second approach a catalyst film is blanket deposited over the film22A which include openings. Since the catalyst deposition tends towashout topography the catalyst thickness in the openings is typicallythicker than over the top surface of film 22A. The catalyst is then isblanket etched until all the catalyst is removed from the top surface offilm 22A. Since the catalyst film is thicker in the openings, at thebottom of each opening will remain a layer of unetched catalyst.

In a third approach, the dielectric film 12 shown in FIG. 34 is removedand a blanket film 70 is deposited. Openings are made in the film 70 anda blanket catalyst film is deposited over the layer 70. The catalystover the top surface of film 70 is “shaved” by a CMP step, but thecatalyst filling the opening is not removed. Film 22B is then depositedand patterned to obtain the structure shown in FIG. 35.

In a fourth approach film 22B is deposited first and patterned usingmask 2 (FIG. 12) to expose layer 20. A conformal deposition of film 70is carried out over the structure so film 70 also covers layer 20 andthe sidewalls of film 22B. Film 70 is chosen such that it has a highsurface mobility for the catalyst. Openings (pores) are then formed infilm 70. The size of each pore is such that it can accommodate no morethan one catalyst particle. The surface of the wafer is flooded with acolloid containing the catalyst particles. Various techniques can beapplied to pull the catalyst particles into the pores. In one specifictechnique the catalysts are negatively charged, the colloid consists ofan aqueous solution, and film 70 is chosen to be SiO₂. The catalystparticles are naturally repelled from the negatively charged SiO₂surface. To stimulate the process of populating the pores with catalystparticles, positive pulses can be applied to the substrate. Excesscatalyst particles not trapped in pores can then be washed off thesubstrate surface using techniques well known in the art.

The process steps that lead to final structures shown FIGS. 36 and 37 inthe two main cross-sections A-A′ and B-B′ remains the same as for thetwo embodiments discussed earlier. As a result of embedding the catalyst24 in openings formed in layer 70, the structure is more symmetricalwith dielectric plugs surrounding the top and bottom portion of thenanowires 26. These plugs 34 and 70 can be viewed as the gate spacers ofa conventional planar FET that was rotated by 90 degrees.

Specifically, FIGS. 36 and 37 show a FET including a bottom epitaxialconductive layer (e.g. silicide contact 20) and a plurality ofsemiconductor nanowire channels 26 located on the bottom epitaxialconductive layer (e.g., silicide contact 20). In accordance with thepresent invention, each of the semiconductor nanowire channels 26 isperpendicular to the bottom epitaxial conductive layer. The FET alsoincludes a top contact, i.e., drain contact 44, that is located abovethe plurality of semiconductor nanowire channels 26, wherein the topcontact, i.e., drain contact 44, which is perpendicular to thesemiconductor nanowires. The FET also includes a gate dielectric 30surrounding each of the nanowires 26 and a gate conductor 32 surroundingthe gate conductor 30. In accordance with the present invention, thegate conductor 30 is spaced apart from the bottom epitaxial conductivelayer (i.e., silicide contact 20) by a bottom insulating 70 and the gateconductor 32 is spaced apart from the top contact 44 by an insulatorplug 34. 10046] The source and drain (not specifically labeled) areformed at the ends of each nanowire. Doping of the silicide canincorporate dopants (by diffusion) in the nanowires ends. Additionally,by using a doped oxide (such as borosilicate glass or phosphosilicateglass) for insulators 70 and 34, it is possible to dope the ends of thenanowires by solid source diffusion (see, for example, J. M.Hergenrother, et al. ibid.). As with the Hergenrother, et al. paper,this will require to sandwich insulator 70 and plugs 34 between two thinsilicon nitride layers to prevent diffusion of the dopant into the gatematerial. The top end of the nanowires can also be doped separately froma gas phase before a silicide is formed (e.g., at the time of FIG. 9).Additionally, the source and drain may be intentionally made asymmetric(for example lower doping of the drain as compared with the source).This may lead to a faster device due to reduced gate-drain capacitance.

It is noted that due to the very small diameter of nanowiresconventional doping techniques that are practiced in silicon technologymay not be the best way to form a source and drain in the nanowires.Inducing carries in the semiconductor by appropriate surface treatmentcan also provide carrier rich regions at the end of the Si nanowires (assimilar to what would have been achieved by doping).

FIGS. 38 and 39 show another embodiment of present invention where thenanowires 26 are grown on a heavily-doped epitaxial semiconductor layer90. Layer 90 is deposited over the epitaxial silicide layer 20 usingtechniques well known in the art. An example of silicon epitaxy onnickel silicide can be found in S. C. Wu et. al., “Epitaxy of silicon onnickel silicide”, Phys. Rev. B 32, p. 6956 (1985). It is also possibleto epitaxially grow silicide film 20 (e.g. NiSi₂) over region 16, ratherthan forming it by reacting a metal, as was earlier discussed inreference to the SALICIDE method. The epitaxy of the silicide film 20can be continued by the epitaxy of the heavily-doped siliconsemiconductor film 90. Forming films 20 and 90 with one-step epitaxyleads to a clean interface between the two films. The process steps thatlead to the final structure of FIGS. 38 and 39 remain the same as thecatalyst 24 is deposited over film 90 (FIG. 4 or 21) or in pore made infilm 70 that is deposited over film 90.

In view of all the issues mentioned earlier with respect to doping ofultra-thin nanowires, another advantage for introducing layer 90 is thatit can provide a source region that is external to the nanowire body.This way doping the ends of the nanowire is no longer required. Anexternal drain region can also be added by introducing a heavily-dopedsemiconductor layer between the top portion of the nanowires 26 and thedrain contact 44.

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present invention. It is therefore intended that the presentinvention not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

1. A semiconductor structure comprising: a silicide contact layerlocated within, or on a portion of a semiconductor substrate; aplurality of nanowires located on said silicide contact layer; a gatedielectric surrounding said plurality of nanowires; a gate conductorlocated on said gate dielectric; and a source and drain located at eachend of said nanowires.
 2. The semiconductor structure of claim 1 whereinsaid plurality nanowires is perpendicular to said semiconductorsubstrate.
 3. The semiconductor structure of claim 1 further comprisinga top drain contact and LTO plugs spacing said gate conductor from saidtop drain contact.
 4. The semiconductor structure of claim 1 whereinsaid plurality of nanowires includes at least one material differentthan that of said substrate.
 5. The semiconductor structure of claim 1wherein said silicide contact layer is epitaxial and mimics saidsubstrate crystal orientation.
 6. The semiconductor structure of claim 1further comprising a dopant region beneath said silicide contact whichis located within said semiconductor substrate.
 7. The semiconductorstructure of claim 1 further comprising LTO plugs located above andbelow said gate conductor.
 8. The semiconductor structure of claim 1wherein said nanowires are single-crystal Si nanowires havingsubstantially the same crystal orientation.
 9. The semiconductorstructure of claim 1 wherein said silicide contact layer comprises atleast one metal selected from the group consisting of Ni, Co, Ti, and W.10. The semiconductor structure of claim 1 wherein each nanowireincludes tip ends that comprise a silicide.
 11. The semiconductorstructure of claim 1 further comprising a heavily doped epitaxialsemiconductor layer formed between said nanowires and said silicidecontact layer.
 12. A field effect transistor (FET) comprising: a bottomepitaxial conductive layer; a plurality of semiconductor nanowirechannels located on said bottom epitaxial conductive layer, wherein saidplurality of semiconductor nanowire channels are perpendicular to saidbottom epitaxial conductive layer; a top contact layer located over saidnanowire channels, wherein the contact layer is perpendicular to saidplurality of semiconductor nanowire channels; a gate dielectricsurrounding each of said semiconductor nanowire channels; a gateconductor surrounding said gate dielectric, wherein said gate conductoris spaced from the bottom epitaxial conductive layer by a bottominsulating layer and said gate conductor is spaced from the top contactlayer by an insulator plug; and a source and drain located at each endof said plurality of semiconductor nanowire channels.
 13. The fieldeffect transistor of claim 12 wherein spacing between nanowires channelsis substantially the same as a diameter of an individual nanowirechannel.
 14. A method of forming a semiconductor structure comprising:forming a silicide contact layer on, or within, a specified region of asemiconductor substrate; forming nanowires from a plurality of catalystdots that are formed over said silicide contact layer; depositing a gatedielectric and a gate conductor over said nanowires; planarizing saidnanowires to trim said nanowires to be of same length; recessing thegate conductor and forming insulator plugs over said recessed gateconductor; and forming contacts to an upper surface of each of saidnanowires, to said silicide contact layer and to said gate conductor.15. The method of claim 14 further comprising forming an insulatinglayer over said silicide contact layer; etching openings in saidinsulating layer; and forming said catalyst dots in said opening. 16.The method of claim 14 further comprising siliciding at a tip of each ofsaid nanowires by a self-aligned silicidation process.
 17. The method ofclaim 14 wherein said catalyst are formed by a self-assembled method.18. The method of claim 14 wherein said nanowires are formed by acatalyst driven epitaxy.
 19. The method of claim 14 wherein saidnanowires are formed perpendicular to said semiconductor substrate. 20.A method of forming a semiconductor structure comprising: forming asilicide contact layer on, or within, a specified region of asemiconductor substrate; forming nanowires from a plurality of catalystdots that are formed over said silicide contact layer; depositing a gatedielectric and a filling material over said nanowires; planarizing saidnanowires to trim said nanowires to be of same length; removing thefilling material and forming a recessed gate conductor in the spacepreviously including the filling material; forming insulator plugs oversaid recessed gate conductor; and forming contacts to an upper surfaceof each of said nanowires, to said silicide contact layer and to saidgate conductor.